This is incorrect. It is not scaling like the name suggests but they are definitely getting measurably smaller.

https://www.tsmc.com/english/dedicatedFoundry/technology/logic/l_5nm

In fact, in order to “print” a transistor requires extreme UV light so that the wavelength is small enough that the fringing effects do not ruin the outline of the printed structure.

https://en.wikipedia.org/wiki/Extreme_ultraviolet_lithography

It is very expensive and requires a lot of maintenance.

The smallest patterning is used for the transistors and the lowest metal layers. The higher metal layers still use regular UV optical pattern printing.