on_ t1_ira5ccj wrote
1000 layers. Does this means that it has to be lithography-etch lithography-etch 1000 times? That’s insane. Is that cost feasible?
ElXGaspeth t1_iraq1ku wrote
It's not 1000 etch cycles like you think of. It will be 1000 layers of the (if I remember correctly) word lines/bit lines stacked up. The cells are vertical columns that run through the whole staircase. They etch the columns for the NAND cells and the staircase for landing contacts differently. It'll be a lot of etching, but not one per layer like you're picturing. It'll more likely be multiple decks of etching.
I'm a little rusty at this, though. I was mainly a DRAM guy.
Viewing a single comment thread. View all comments